The construction of the wafer holders
is adaptable to nearly every customized specs.
Example: Neck-elongation and suspension-device
Different design due to horizontal or
vertical positioning in the basin
To ensure stress-free pressing of the wafer
Adjustable diaphragm-liquid pumps
for filling and evacuating
Intended use in connection with
Vessel Units or Process Units
Consisting of HF-Generator
and Ultrasonic Converter
Application:
vacuum supply for wafer holder function
Type 01 and 02 with pressure switch
Type S for permanent running up to max. 1 hour
PDF Download:
Instructions
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