distributors contact downloads network about us
 

Basic-G

Contacting: from backside
Contacts: within protected room
Working surface: complete frontside
protected Backside

Dimension 2" 3" 4" 5" 6" 8"
A - length 105 mm 135 mm 185 mm 200 mm 227 mm 260 mm
B - total width 65 mm 87 mm132 mm 145 mm 160 mm 212 mm
C - width neck 65 mm 50 mm80 mm80 mm 80 mm 80 mm
D - thickness 12 mm 12 mm 12 mm 14 mm 14 mm 14 mm
E - compl. thickness 44 mm 44 mm 44 mm 44 mm 44 mm 44 mm
F - edge exclusion 5 mm5 mm5 mm5 mm5 mm5 mm

Plus-G

Contacting: from frontside
Contacts: within protected room
Working surface: frontside excl. edge of 5 mm circumferential
protected: Backside and edge
PDF Download: Product Sheet | Instructions

Dimension 2" 3" 4" 5" 6" 8"
A - length 122 mm145 mm186 mm239 mm239 mm313 mm
B - total width 80 mm105 mm132 mm190 mm190 mm263 mm
C - width neck 80 mm80 mm80 mm80 mm84 mm100 mm
D - thickness 12 mm14 mm14 mm15 mm15 mm15 mm
E - compl. thickness 21 mm22 mm22 mm22 mm22 mm24 mm
F - edge exclusion 5 mm5 mm5 mm5 mm5 mm5 mm

Pieces-G

Attachment to any silicet wafer
holder type BASIC or PLUS for processing
wafer parts of various sizes

Contacts: within protected room

System-G

Wafer Holder Vacuum-System complete

Consisting of:
- Wafer Holder with Press Assist
- Vacuum-Box with Power Pack

Double-sided

Electroplating of frontside and
backside simultaneously

Contacts: within protected room

Horizontal

Horizontal wafer positioning during processing

Contacting: from frontside
Contacts: within protected room
Working surface: complete frontside
protected: Backside

Standversion

Detached Wafer Holder by fitted stands

Current baffle

to improve homogeneity of film thickness
(avoidance of film thickness heightening at the edge)

Type I

Contacting: possible from both sides
Contacts: within protected room
Substrate format: angular

Type II

Contacting: possible from both sides
Contacts: within protected room
Substrate format: round with angular masking area
With or without current frame

Special Sizes

Contacting: from frontside
Contacts: within protected room
Substrate format: user defined
With suspension device
Application: electroplating or LIGA

Batch Processing

Electroplating of 5 wafers simultaneously for example

Contacting: from frontside
Contacts: within protected room

Typ I

Contacting: from frontside
Contacts: within protected room
unprotected:Backside

Applicable for wafer holder and EP-Unit

Single Clip-G

Wafer fixing by Clip-ring,
broken to fit customized contact device
Wafer will be hold, not protected

Twin Clip-G

Electroplating of two wafers
simultaneously with one device

Conpro-G

Precise contacting of customized
provided contact positions

Contacts: within protected room
Backside: not protected
With suspension-device

Trio

Contacting: possible from both sides
Contacts: within protected room
Edge exclusion: < 3 mm circumferential
Condition: start coat up to the wafer edge
protected: Backside and edge

Type I

Flexible for clamping constant
or even different formates

Type II

Flexible for clamping constant
or even different formates