Contacting: from backside
Contacts: within protected room
Working surface: complete frontside
protected Backside
| Dimension | 2" | 3" | 4" | 5" | 6" | 8" |
| A - length | 105 mm | 135 mm | 185 mm | 200 mm | 227 mm | 260 mm |
| B - total width | 65 mm | 87 mm | 132 mm | 145 mm | 160 mm | 212 mm |
| C - width neck | 65 mm | 50 mm | 80 mm | 80 mm | 80 mm | 80 mm |
| D - thickness | 12 mm | 12 mm | 12 mm | 14 mm | 14 mm | 14 mm |
| E - compl. thickness | 44 mm | 44 mm | 44 mm | 44 mm | 44 mm | 44 mm |
| F - edge exclusion | 5 mm | 5 mm | 5 mm | 5 mm | 5 mm | 5 mm |
Electroplating of frontside and
backside simultaneously
Contacts: within protected room
Contacting: possible from both sides
Contacts: within protected room
Substrate format: angular
Contacting: from frontside
Contacts: within protected room
Substrate format: user defined
With suspension device
Application: electroplating or LIGA
Electroplating of 5 wafers simultaneously for example
Contacting: from frontside
Contacts: within protected room
Contacting: from frontside
Contacts: within protected room
unprotected:Backside
Applicable for wafer holder and EP-Unit
Wafer fixing by Clip-ring,
broken to fit customized contact device
Wafer will be hold, not protected