Vessel Unit

• Easy handling
• Adequate to standard proceedings

Wafer Holder

Fixing and protection of the wafer while processing

• Processing of wafer aperture
• Min. edge exclusion
• Single or double-sided holder
• Batch compatible

Process Unit

• Modular design
• Space-saving and cost-saving
• Substrate or electrode positioning variable
• Adaptable to all particular proceedings
• Batch compatible