Variable Parameters » Distance cathode : anode - even use of pellet baskets » Position anode : cathode 0° - 180° (anode above cathode) rotatable » Electrolyte volume in front of the cathode » Flow: velocity 0 - 3,2 l/min,
free or controlled flow by using a flow plate with defined layout » Temperature control » Cathode shadowing by using a baffle » Filter positioning in front of the cathode » Wafer cassette with circumferential contact within protected room,
processing of different wafer/substrate sizes in one unit