Variable Parameters
» Distance cathode : anode - even use of pellet baskets
» Position anode : cathode 0° - 180° (anode above cathode) rotatable
» Electrolyte volume in front of the cathode
» Flow: velocity 0 - 3,2 l/min,
   free or controlled flow by using a flow plate with defined layout
» Temperature control
» Cathode shadowing by using a baffle
» Filter positioning in front of the cathode
» Wafer cassette with circumferential contact within protected room,
   processing of different wafer/substrate sizes in one unit